Clean room internal equipment "Horizontal Fully Automatic Reticle Stocker"
The shelf brackets are made of Delrin resin molded products! Since it has a built-in computer, there is a wealth of self-developed software.
We would like to introduce our cleanroom internal equipment, the "Horizontal Fully Automatic Reticle Stocker." It employs a self-developed class 1 compliant multi-joint arm robot (with ultra-low dust generation mechanism, absolute value control servo motor, position correction using CCD camera, and variety management capabilities). Additionally, the reticle cases can accommodate not only 6-inch cases from Nikon and Canon but also 5-inch reticle cases and special cases such as SMIF cases. 【Features】 ■ An ULPA filter is installed at the front of the shelf, and the reticle cases are stocked directly under the filter. ■ To prevent impact during case entry and exit, the shelf supports are made of Delrin resin molded products. ■ It can be set up with an automatic transport system, and manual or AGV devices can also be used for entry and exit. ■ It has a built-in computer, allowing for a wealth of self-developed software. ■ It is also possible to link with the customer's host computer. *For more details, please refer to the PDF document or feel free to contact us.
- 企業：日本エアーテック 本社
- 価格：Other
